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D-COAX, INC. • P.O. Box 999

Newberg, Oregon 97132  USA

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Model D14 Analytical Probe Station ....................

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Purchasing Information

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Model D14 Analytical Probe Station for large wafers, multiple wafers or circuit board testingThis heavy duty manual wafer probing station is designed for a constant, comfortable, and accurate operation on up to 14” wafers.


This turn-key, manually operated wafer probing station is part of the D-COAX commitment to the semiconductor test and measurement and fabrication industries. This affordable machine offers a heavy duty design for continuous usage. This is the first wafer probing station to offer completely independent X, Y, Z, Θ and ganged Y control which has back-drivable Z controls. Its versatility, affordability, and user friendly features make it the best manual wafer probe station on the market!


Model D14 Probe Station Benefits:

Model D14 Analytical Probe StationIn the last few decades, the probe stations have evolved from user friendly measurement tools into the large and expensive measurement tools that require training in new software and non-intuitive controls.  These new complicated probe stations have greatly benefited the production throughput but development engineers are stuck using these machines for their development work. But not anymore, no more waiting for the probe station to be available because of complex software, systems, and training: people tell us that they really like the straight forward controls and how easy it is to use the D14. At D-COAX we listened to the wishes and complaints of engineers that need measurements but they do not want many of the features of the probe stations they use now.  D14 is only 1/3 of the price of the competitor's machines and development engineering departments can greatly benefit by having a dedicated station for development and characterization.


probe, vacuum control, device rotation, probe station vacuumStraight-forward use:  Measurements on the D14 probe station are easy and quick since the controls are straight forward. There are easy to understand controls for probe placement, vacuum control, device rotation, ganging the probes (used for a repeated pattern on devices).  There is no complex software to learn, the user can see the entire device with a normal microscope instead of a video monitor.  The device to be measured is not deep within the probe station with motors and other apparatus in the way, and there is no need to move things around just to see where the probes are.


Small Footprint probe station: The D14 fits comfortably in most labs and engineering environments. It is only 39 inches long and 26 inches wide and 19.5 inch high. This is an area that allows the test equipment to sit closer to the device to be measured, the coaxial cables can be shorter for better corrections, and the D-14 probe station is 2 to 4 times smaller than most probe stations with which it competes.  All though the D14 uses less bench space, the D14 can measure large devices with its chuck diameter of 14 inch.


Crucial features to make your job easier: The chuck rotates 380 degrees, without any back lash, so that devices can be reversed without adjusting the vacuum. Four 6-inch wafers can be loaded simultaneously on this 14 inch chuck for comparison measurements. All the probe positions can reach all of the 14 inch chuck surface so you don’t run into repositioning headaches. All the concentric ring vacuums are independent as well as all 17 of the diagonal vacuum controls for complete control over multiple devices to be measured. The positioners are specially designed so that pressure cannot accidentally push the probe into a device. The gantry style design of the D14 allows for very large loads, like tuners or load pull devices, to be placed on the system and still glide easily for all the movements. The microscope light source is nicely tucked away on top of the post for the microscope so that the fiber optic light pipe does not drag across the system controls or your devices.



Low Cost: The Model D14 probe station with a typical configuration starts at less than $50,000. USD.

Typical configuration includes:

1. Model D14 probe station

2. Vacuum pump (vacuum up to 29 in. Hg (31 mbar))

    Microscope (Olympus: 6.7X - 45X magnification, with 2 eyepieces, focusing mount, stand, light source, and fiber optic ring light).  Other microscope are available (Olympus: 16X – 112X, Olympus: 19X – 135X). See accessories.


Competitor capabilities/cost vs. D-COAX

chart showing competitor capabilities and cost vs d-coax



Model D14 Probe Station Features

• Full reach of the 14 inch (355.6mm) chuck surface


• Independent Vacuum control for 3", 6", 8". 10", 12" and (14") wafer diameters.


• Seventeen independently operated vacuum positions for calibration substrates or other devices.


• One-to-one correlation of vacuum actuation and chuck vacuum positions


• Independent probe to probe pitch or ganged probe to probe pitch.


• Two independent Z-lifts with locks.


• Zero backlash Θ control with locking handle.


• Independent (fine) X, Y, Z controls for maximum alignment.



• Independent (coarse) X, Y, Z, Θ, ganged Y controls.


• Back drivable (coarse) X controls.


• Very low table to chuck height of 6.25 inches


• Very small foot print, width 39 inch by length 26 inch, weight 200 lbs (without microscope or microscope hardware or light source. Add an additional 12 inches to the width for the microscope boom).  Over all product dimensions are 39 inches wide, 26 inches long (with microscope boom 36 inches), 19.5 inches high (25 inches with microscope).


• Storage tray for small tools.


• Vibration isolation feet.

Model D14 Probe Station Requirements/Utilities:

In order to have a complete test setup for measuring the DUT the following hardware and utilities are required:

1. Test instrument capable of the specific DUT test requirements

2. Cables capable of the specific DUT test requirements (see D-COAX cable assemblies offerings - Semi-rigid    and Flexible assemblies)

3. Vacuum pump

4. Microscope

5. Microscope hardware and light-source

6. Probes (D-COAX suggests GGB probes (

7. Accessories for specific DUT sizes and topography (Accessories offerings by D-COAX)


D-COAX offers the following probe station accessories:



Price $350.00 USD

Two probes oriented to face each other isn’t always enough selection because some circuits have pads at 90 degrees to the other probe. The adapter can be used to place the probe 90 degree from the original position or hold two probes oriented at 90 degrees to each other.  The pitch between two probes can be adjusted by sliding the probe holders inside the 0.6 inch slots in the adapter.   Picture of 90 degree probe converter/adapterUse another adapter on the opposite side for wider pitch.

This probe station adapter is compatible to any D-COAX probe station.


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The probes are the means of accessing the test points on your PCB or wafer.


The following probes can be ordered directly from the website or we can order them for you to be included with D-Coax products. Our handling fee is $50 each. Click on the Request a Quote button, specify the probe you would like to purchase and submit your quote request.

Example Probe

• High Impedance probes

• Active probes

• Microwave Testing probes

• RF & DC probes

• Waveguide Input probes

• Calibration Substrates

• DC disposable tip probes


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The microscope allows for the precision optical alignment of the probes to the circuit patterns and small area test points.


The following Olympus microscopes can be ordered directly from the website.  Or, we can order them for you.  Click on the Request a Quote button and specify the microscope you like us to quote and submit the request.


The following microscope model selections are recommended to use with our probe stations:


• SZ-6145  6.7X – 45X magnification, 10X eyepieces, stand with weighted base, focusing arm, light source, ring light.

Olympus Microscope

• SZ-ZB7 16X – 112X magnification, 10X eyepieces, stand with weighted base, focusing arm, light source, ring light.


• SZ-6145  19X – 135X magnification, 15X eyepieces, auxiliary objective lens, stand with weighted base, focusing arm, light source, ring light.



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From high frequency custom connectors or custom test fixtures to modifications of other products we sell, we have the expertise to help you get to where your project needs to go. Typical custom projects include connector modification for production solutions, probe station customer specific accessories, and more.


Connect from your instrument to the probe station.

D-coax offers several varieties of high performance Flexible and Semi-rigid assemblies up to 65GHz.


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Microscope stands are used to secure the microscope in the desired lication.


The following stands can be ordered directly from the website.  Or, we can order them for you.  Click on the Request a Quote button and specify the microscope stand you would like us to quote and submit the request.


The following microscope stands selections are recommended to use with our probe stations:


microscope stands, sms16A

• SMS16A

Boom Stand with 15.75"

Vertical Post & Weighted Base


• SMS15A

Boom Stand with 15.75"

Vertical Post & Table Clamp


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Vacuum pump is used to hold wafers, PCB’s or other DUT’s to the chuck so the DUT doesn’t shift during the test.


The following Gast pumps can be ordered directly from the website.  Or, we can order them for you.  Click on the Request a Quote button and specify the pump you like us to quote and submit the request.

Vacuum pump for probe stations

The following pump model is recommended to use with our probe stations:


• DOA-P701-AA 115 Volts, 60 Hz, single phase, vacuum up to 29 in. Hg (31 mbar)

Product lead time:

The D14 has a typical lead time of 16 weeks. Call for availability.



A) Due to the high technology in the D-COAX products and also the potential end use of its products by some Buyers, the Government of the United States of America  has ruled that export licenses are required for the export of some D-COAX products.

B) Buyers who export purchased products from the USA hereunder assume all responsibility for the products purchased hereunder and assume all responsibility for obtaining any required export authorization.C) Buyer shall not export, re-export, or transfer technical data or products supplied by D-COAX, directly or through others, or the direct product of such data, to any country or user to which such export, re-export, or transfer is restricted by United States or local country law or regulation without first obtaining any required government license, authorization, certification, or approval.


See Global Policies for terms and conditions.


To purchase the D-14 Probe Station please follow the instructions listed below.

Here are the procedures for the letter of credit:

1.  Buyer (applicant) and seller (beneficiary) must both sign a contract that both are in agreement.

2.  Buyer will open a letter of credit to seller through their own bank and transmit that letter to Wells Fargo Bank.

3.  When Wells Fargo Bank has received the letter of credit they will use a courier to copy the beneficiary of the letter of credit.

4.  Seller will then prepare to ship the goods.

5.  Once the goods are shipped, the seller will present the shipping documents to Wells Fargo for negotiation.

6.  Wells Fargo will advise the seller that (assume) all the documents have complied with the letter of credit terms.

7.  Wells Fargo will send the documents to the buyer’s bank.

8.  Applicant’s bank will check the documents and will advise the applicant that the documents are “in order”. (assume)

9.  Applicant will then instruct their bank to remit funds to Wells Fargo and at the same time the documents will be released to the applicant for them to clear the goods.

10. Wells Fargo has received the funds and will credit to beneficiary’s account according to the beneficiary’s instructions.